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YOKOGAWA CSU-X1 User Manual

YOKOGAWA CSU-X1
142 pages
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-12-
CAUTION
Please ONLY use attached cables, otherwise, it is possible to fail EMC
conformity.
CSU control cable
(ferrite core at this side).
Interlock key
Power cable
Filter Wheel 1(FW1) cable
Filter Wheel 2(FW2) cable
RS232C cable
PC COM port

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YOKOGAWA CSU-X1 Specifications

General IconGeneral
BrandYOKOGAWA
ModelCSU-X1
CategoryScanner
LanguageEnglish