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B 200
Alcatel Vacuum Technology France - ATH 200 User’s Manual
Neutral gas purge and inlet vent
connection
GB 00019 - Edition 03 - March 04
Gas characteristics
Type
If the inlet vent pressure is too high, the inlet valve will always
stay closed.
ASM 122 D - ASM 142 D: ≤ 5 sccm
ASM 182 TD+: ≤ 50 sccm
Use pressure
Nitrogen is typically the neutral gas used but you can use any gas on
the condition that it is poor in helium (concentration ≤ 1 ppm).
Take care with the ambiant air: it should not be polluted with helium.
According to the installation or item to test. The gas should be clean,
dry, without dust, no toxic.
0.3 ± 0.1 bar relative (≈ 20 psig).
Quality/purity
Purge flow
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