GB 01244 - Edition 03 - September 04
1/2
A 800
ASM 182 / 192 TD+
Technical characteristics
Measurement range
(Helium)
Crossover pressure
(at inlet)
mbar.l/s Pa.m
3
/s mbar Pa
Gross leak test mode
1.10
-8
to 1.10
-1
1.10
-9
to 1.10
-2
6 600
High sensitivity test mode
1.10
-11
to 3.10
-4
1.10
-12
to 3.10
-5
2.10
-2
2
Sniffing test mode
1.10
-7
to 1.10
-1
1.10
-8
to
1.10
-2
sniffer probe at atm. pressure
Response time (Inlet port blanked off) < 0.1 s
Helium pumping speed:
At inlet port 4.4 l/s
Roughing (primary) pump characteristics:
Hybrid (primary) pump pumping speed (in air) 25 m
3
/h (15 cfm) + 10 l/s
Hybrid turbomolecular pump characteristics:
Hybrid turbomolecular pump pumping speed (in air) 110 l/s
Hybrid turbomolecular pump exhaust pressure safety limit 6 mbar
Analyzer cell (Spectro):
Analyzer cell design self protected 180° magnetic deviation mass spectrometer
Analyzer cell filament 2 tungsten filaments
Analyzer cell sensitivity 3.10
-4
A/mbar
Emission current range 0.2 to 2 mA
Air pumping speed 110 l/s
Helium pumping speed 30 l/s
To Next Page
Loading...
