Alcatel IPUP A100 - IPUP A100 Description

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Alcatel Vacuum Technology France --- IPUP A100 Instruction manual
IPUP A100 description
IPUP A100 DESCRIPTION
The IPUP A100 pump includes an intelligent monitoring system.
This pump is fully integrated in a compact and enclosed frame which
includes:
l the control panel located on the front panel,
l the facilities panel located on the rear panel,
An Amat SPI connector located on the rear facilities panel allows pump
control and communication with the process tool.
A hand held display module can be connected to the front panel to
display and program the pump parameters.
EXHAUST
Rear facilities panel Front panel
Amat SPI interface connector
INLET
Hand held display module
Pressure regulator
N2 IN
Water IN
Water OUT
Main power
Manometer
G
B
0
0
5
1
6