Alcatel IPUP A100 - Page 13

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Alcatel Vacuum Technology France --- IPUP A100 Instruction manual
IPUP A100 description
IPUP A100L/LI equipment
The IPUP A100L/LI is designed for clean applications such as load lock
pumping, cryopump regeneration and backing of turbopumps on
non---corrosive processes.
l only a water cooling circuit is installed,
l no nitrogen purge is needed.
The IPUP A100LI pump is equipped with an additional intermediate port
for specific applications where a permanent pumping flow of about
35 m
3/
h mbar is required (example: dynamic seal pumping).
IPUP A100L/LI EQUIPMENT
Pump
¡ Low pressure stage
©¢£ Transfer stage
¤ High pressure stage
EXHAUST
M
21 3 4 5
Monitoring
Motor
Frequency converter
Anti suckback valve
Water IN
Cooling circuit
¥ nozzle
Tc Temperature sensor
M Motor sensor
Water OUT
Pump
Intermediate port for IPUP A100LI version only
INLET
SILENCER
6
Tc
G
B
0
0
5
1
6