Alcatel Vacuum Technology France --- IPUP A100 Instruction manual
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IPUP A100
Dear Customer,
You have just purchased an Alcatel dry
pump.Wethankyouandareproudtoinclude
you as one of our customers.
This product has benefited from Alcatel’s
many years of experience in semiconductor
processes and dry pumping.
For optimum performance and to obtain
full satisfaction from this equipment, we
recommend that you study this manual
before any intervention on your pump, in
particular, the chapter on installation and
start up.
Applications
l P/PI version: for corrosive, reactive, flammable, pyrophoric,
oxidizing processes.
l L/LI version: for clean pumping.
Advantages
l Reduced volume and footprint.
l Low operating cost.
l High performance (pumping speed and ultimate pressure).
l Advanced monitoring functions.
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