Contents
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Alcatel Vacuum Technology France --- IPUP A100 Instruction manual
IPUP A100 instruction manual
Operation (cont’d)
Monitoring system function table
IPUP A100L version C 51. . . . . . . . . . . . . . . . . . . . . . .
Gas purge and temperature according to the
semiconductor processes C 60. . . . . . . . . . . . . . . . . .
Saving and loading of pump configuration
(with monitoring system) C 70. .. . . . . . . . . . . . . . . . . . .
Monitoring system setting for transport C 80. . . . . . .
Use of the serial link C 90. . . . . . . . . . . . . . . . . . . . . . .
Troubleshooting
First level of troubleshooting D 10. . . . . . . . . . . . . . . . . .
Diagnosis and troubleshooting D 20. . . . . . . . . . . . . . . .
Message numbers D 30. . . . . . . . . . . . . . . . . . . . . . . . . .
Pump does not start.
Hand held display module is not illuminated D 40. . . .
Pump does not start.
IPUP A100 without hand held display module D 50. . .
Pump does not start.
Hand held display module is illuminated D 60. . . . . . .
Pump does not start.
Display is showing a message or an alarm D 70. . . . .
Fault message display.
Facilities problem D 80. . . . . . . . . . . . . . . . . . . . . . . . . . .
Fault message display.
Temperature problem D 90. . . . . . . . . . . . . . . . . . . . . . . .
Fault message display.
Pressure problem D 100. . . . . . . . . . . . . . . . . . . . . . . . . . .
Fault message display.
Maintenance problem D 110. . . . . . . . . . . . . . . . . . . . . . . .
Pump is running.
No message D 120. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .