Azbil Micro Flow CMS9500 - Page 11

3
Chapter 1. Overview
z
SUS 316 model
Basic
model
No.
Flow
rate
range
Model
Gas-con-
tacting
material
Con-
nection
method
Gas
type
Out-
put
Op-
tion 1
Op
-
tion 2
Op
-
tion 3
Op
-
tion 4
Ap
-
pend-
ed No.
Description
CMS Gas mass ow meter
9500 0–500 mL/min (standard)*
1
*
4
0002 0–2 L/min (standard)*
1
*
4
0005 0–5 L/min (standard)*
1
*
4
0020 0–20 L/min (standard)*
1
*
4
0050 0–50 L/min (standard)*
1
*
4
0200 0–200 L/min (standard)*
1
*
4
0500 0–500 L/min (standard)*
1
*
4
B With display (ow direction: left to right)
R With display (ow direction: right to left)
T SUS316
U
UNF connection, CMS0200/0500: 3/4-16 UNF
CMS9500/0002/0005/0020/0050: 9/16-18 UNF
T
Rc connection,
CMS0200/0500: Rc 1/2,
CMS9500/0002/0005/0020/0050: Rc 1/4
S
Swagelok connection,
CMS0200/0500: 1/2 Swagelok
CMS9500/0002/0005/0020/0050: 1/4 Swagelok
V
VCR connection,
CMS0200/0500: 1/2 VCR
CMS9500/0002/0005/0020/0050: 1/4 VCR
N Air/nitrogen*
2
S Oxygen*
3
*
5
2 Analog output: 0–5 V DC / 1–5 V DC / 4–20 mA
0 No optional functions
1 With RS-485 communications
0 No optional functions
0 No degreasing
1 Degreasing for gas-contacting parts*
5
0 No optional functions
D With inspection report
Y With traceability certificate
0 Product version
*1. mL/m in (standard) and L/min (standard) indicate the volumetric ow rate per minute converted to conditions of 20 °C and
101.325 kPa (1 atm).
The reference temperature can be changed in a range from 0 to 35 °C (in 1 °C increments).
*2. The model is set for air/nitrogen use before shipment.
The gas type can be changed to argon, carbon dioxide (CO
2
), fuel gas 13A (LNG, either 45 or 46 MJ/m3), 100 % propane, 100 %
methane, or 100 % butane.
*3. The model is set for oxygen use before shipment.
The gas type can be changed to air/nitrogen, argon, carbon dioxide (CO
2
), fuel gas 13A (LNG, either 45 or 46 MJ/m3), 100 %
propane, 100 % methane, or 100 % butane.
Never change the setting back to oxygen if the CMS has been used even once for any other gas.
*4. The ow rate ranges shown in the above table are for air.
The measurable ow rate range varies depending on the gas type.
For details, see Maximum measurable ow rate and output voltage for various gas types (P. 32).
*5. If oxygen is selected as the gas type, “1” (degreasing for gas-contacting parts) must be selected for option 3.