Brooks 5850S - Page 24

24
Installation and Operation Manual
X-DPT-Profibus-DP-Interface-eng
PN 541-C-068-AAG
November, 2008
The user can make the selections as listed in the next section using a
configurator program and the files provided. The Brooks Smart Mass Flow
Controller is classified as a compact device.
Byte Mass Flow Controller
1-7 Bus parameters (System parameters)
User_Prm_Data (User parameters)
8 Code for SPC3 ASIC
9 Select gas calibration
10 Failsafe state
11 Primary non fatal alarms
12 Secondary non fatal alarms
13 Non fatal ambient alarms
14 Softstart selection
15 Softstart data (%/sec)
16 Flow unit
17 Temperature unit
18 Totalizer unit
19 Setpoint source
20 Adaptive control
Byte Mass Flow Meter
1-7 Bus parameters (System parameters)
User_Prm_Data (User parameters)
8 Code for SPC3 ASIC
9 Select gas calibration
10 reserved
11 Primary non fatal alarms
12 Secondary non fatal alarms
13 Non fatal ambient alarms
14 reserved
15 reserved
16 Flow unit
17 Temperature unit
18 Totalizer unit
The parameters are described more in detail on the next pages.