Brooks GF125 - Page 16

Installation and Operation Manual
X-DPT-EtherCAT-GF1XX-MFC-eng
Part Number: 541B219AAG
April, 2017
16
Section 2 - Quick Start
Brooks EtherCAT MFCs
High
116
Process Flow Out of Range
Low
0x00000002
Error
Manufacturer Error
120
Pressure Sensor Error
0x00400000
Error
Manufacturer Error
125
Process Pressure Out of
Range High
0x00000004
Error
Device Error
126
Process Pressure Out of
Range Low
0x00000008
Error
Device Error
130
Temperature Sensor Error
0x00200000
Error
Manufacturer Error
135
Temperature Out of Range
High
0x00000001
Error
Device Error
136
Temperature Out of Range
Low
0x00000002
Error
Device Error
142
Excessive Leak-By
0x00020000
Error
Manufacturer Error
145
Process Control Deviation
0x00000004
Error
Manufacturer Error
230
Temperature Stability
0x00400000
Alert
Manufacturer Warning
251
Mounting Orientation
0x00200000
Alert
Manufacturer Warning
260
Input Voltage Out of Range
0x00100000
Alert
Manufacturer Warning
270
Totalizer Overflow
0x00080000
Alert
Manufacturer Warning
299
Warm Up
0x00800000
Alert
Manufacturer Warning
None
Device ID Switch Changed
0x00040000
Alert
Manufacturer Warning