4.1.5. Hardware Incompatibility (Display Code 7)
This condition is reported when there is a hardware/firmware incompatibility
detected. Contact Brooks Technical Support for more information.
4.1.6. Flow Sensor Failure & Error (Display Code 10 and 110)
This condition is reported when the device detects failures of the flow sensor
and/or related electronics, connector, or cable. Note that this condition is
reported as both Sensor Failure and Flow Sensor Error.
4.1.7. Flow Sensor Cooling Recovery (Display Code 111)
This condition is reported when the flow sensor detects that the one or more
of the sensor windings are overheating. To prevent damage to the device,
the power to the sensor windings is reduced and the valve is closed. This
condition can occur when flow higher than maximum rated flow is delivered.
4.1.8. Excessive Drift (Display Code 112)
NOTE: This error is a placeholder for future implementation.
4.1.9. Process Flow Out of Range (Display Codes 115 and 116)
This condition is reported when the measured flow (0x6000:01) is out of the
user specified limits for the specified time. The user specified limits are set
using object 0x4000. Flow limits must be specified in the Flow Units as
defined by 0x8000:01 and the time is set in milliseconds.
Table 4-5 – User Specified Flow Limits
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