Brooks GF125 - Semi Device Profile Area; Table 3-15 - Semi Device Profile

Installation and Operation Manual
X-DPT-EtherCAT-GF1XX-MFC-eng
Part Number: 541B219AAG
April, 2017
29
Section 3 - Slave Configuration
Brooks EtherCAT MFCs
in sub index 02
Units: SCCM
0x08
REAL
RO
Minimum Flow SP
Manufacturer Defined, for
this Gas and Bin with
Configured Full Scale
Range
Units: %FS
All
0x09
REAL
RO
Maximum Flow SP
Manufacturer Defined, for
this Gas and Bin with
Configured Full Scale
Range
Units: %FS
All
0x0A
UINT
RO
Device Bin Number
Manufacturer defined
All
0x0B
UINT
RO
Gas Calibration file
revision number
Latest gas library revision
stored in memory
All
0x0C
UINT
RO
Revision of supported
gas table
Revision number and
description of update
All
0x0D
STRING
(10)
RO
Date of Factory
Calibration
[DD/MM/YYYY]
All
0x0E
STRING
(10)
RO
Date of Last
Calibration
[DD/MM/YYYY], date of
cardinal points calibration.
Note: GF1XX does not
support cardinal point
calibration adjustment.
All
0x0F
USINT
RO
Cardinal Points Array
Size
Size of cardinal point array.
Note: GF1XX does not
support cardinal point
calibration adjustment.
All
0x10
ARRAY
[0..159]
OF
BYTE
RO
Cardinal Points
If all zero - disabled.
Calibration cardinal points
in pairs [SP, Rd]
Units: %FS
Note: GF1XX does not
support cardinal point
calibration adjustment.
All
3.6. Semi Device Profile Area
Table 3-15 – Semi Device Profile
Index
Sub
Index
Data
Type
Access
Name
Description
0xF000
Semiconductor
Device Profile
0x01
UINT
RO
Index Distance
Index offset between PDO entries of two