Brooks GF125 - Page 28

Installation and Operation Manual
X-DPT-EtherCAT-GF1XX-MFC-eng
Part Number: 541B219AAG
April, 2017
28
Section 3 – Slave Information
Brooks EtherCAT MFCs
Offset
Offset service command
executed.
Units %FS
0x9001
Sensor: Pressure
(floating)
EMFC, EMFM
0x01
REAL
RO
Pressure Sensor Full
Scale
Units: Per Pressure Data
Unit Index.
EMFC, EMFM
0x02
REAL
RO
Pressure Reading
Zero Offset
Units: %FS
EMFC, EMFM
0x03
REAL
RO
MFC Pressure High
Threshold Alarm
Limit
Units: %FS
EMFC, EMFM
0x04
REAL
RO
MFC Pressure Low
Threshold Alarm
Limit
Units: %FS
EMFC, EMFM
0x9002
Sensor: Temperature
(floating)
EMFC, EMFM
0x01
REAL
RO
Temperature Sensor
Full Scale
Units: Per Temperature
Data Unit Index.
EMFC, EMFM
0x02
REAL
RO
MFC Temp High
Threshold Alarm
Units: %FS
EMFC, EMFM
0x03
REAL
RO
MFC Temp Low
Threshold Alarm
Units: %FS
EMFC, EMFM
0x9008
Controller: Ramp
Time
MFC, EMFC
0x01
UDINT
RO
Min Ramp Time
Minimum Ramp Time
device is capable of.
Manufacturer Defined
Units: milliseconds
MFC, EMFC
0x900A-
0x900E
Gas Parameter
Instance 1 to 5
Gas Calibration Page 1 to
5
All
0x01
USINT
RO
Gas Calibration Index
1 to 5 = gas calibration
instance is active
All
0x02
UINT
RO
Gas Number
SEMI Number
All
0x03
STRING
(128)
RO
Gas Symbol
Text Symbol
All
0x04
STRING
(128)
RO
Gas Name
Gas Name Text
All
0x05
REAL
RO
Minimum Full Scale
Minimum nominal value for
this BIN and gas type in
sub index 02
Units: SCCM
All
0x06
REAL
RO
Nominal Full Scale
Maximum nominal value
for this BIN and gas type in
sub index 02
Units: SCCM
All
0x07
REAL
RO
Configured Full Scale
Range
Configured full scale range
for the specified gas type
All