Note: This condition is reported as both Sensor Failure and Temperature
Sensor Error.
4.1.13. Temperature Out of Range (Display Codes 135 and 136)
This condition is reported when the measured temperature (0x6002:01) is out
of the device allowable limits. The device allowable limits are defined by the
manufacturer and cannot be adjusted (5
o
C to 70
o
C).
Note: The temperature limits are readable using the Sensor Temperature
Information at 0x9002 in percent of full scale as defined by the Mass Flow
Controller Specific Device Profile (SDP), ETG.5003.202x. Note that full scale
is defined as 500 degrees C.
4.1.14. Excessive Leak-By (Display Code 142)
NOTE: This error is a placeholder for future implementation
4.1.15. Control Deviation Out of Limits (Display Code 145)
This condition is reported when the difference between measured flow
(0x6000:01) and setpoint (0x7003:01) is out of the user specified band for the
specified time. The user specified band is set using object 0x4008. The
band must be specified in the Flow Units as defined by 0x8000:01 and the
time is set in milliseconds.
Table 4-7 – Control Deviation Out of Limits
To Next Page
Loading...
