Brooks GF125 - Page 7

Installation and Operation Manual
X-DPT-EtherCAT-GF1XX-MFC-eng
Part Number: 541B219AAG
April, 2017
vii
Brooks EtherCAT MFCs
Tables
Table 1-1 – Definition of Terms ................................................................................................................... 10
Table 2-1 – RUN Indicator States ................................................................................................................ 14
Table 2-2 – ERROR Indicator States .......................................................................................................... 14
Table 2-3 – Display Code Summary ............................................................................................................ 15
Table 3-1 – Object Dictionary Structure ...................................................................................................... 17
Table 3-2 – Default RxPDO (MFC/EMFC Profiles) ..................................................................................... 19
Table 3-3 – Default RxPDO (MFM/EMFM Profiles) .................................................................................... 19
Table 3-4 – Default TxPDO (EMFC Profile) ................................................................................................ 19
Table 3-5 – Default TxPDO (MFC Profile) ................................................................................................... 20
Table 3-6 – Default TxPDO (MFM Profile) .................................................................................................. 20
Table 3-7 – Default TxPDO (EMFM Profile) ................................................................................................ 20
Table 3-8 – Communication Specific Data .................................................................................................. 21
Table 3-9 – Manufacturer Specific Inputs .................................................................................................... 23
Table 3-10 – Manufacturer Specific Configuration Data ............................................................................. 23
Table 3-11 – Input Data ............................................................................................................................... 24
Table 3-12 – Output Data ............................................................................................................................ 25
Table 3-13 – Configuration Data ................................................................................................................ 26
Table 3-14 – Information Data .................................................................................................................... 27
Table 3-15 – Semi Device Profile ................................................................................................................ 29
Table 3-16 – Value Range Setting .............................................................................................................. 30
Table 3-17 – Manufacturer Specific Device Data ........................................................................................ 32
Table 3-18 – SDP and CDP Device Specific Inputs .................................................................................... 33
Table 3-19 – SDP and CDP Device Specific Information Data ................................................................... 33
Table 3-20 – SDP and CDP Command Objects ......................................................................................... 35
Table 4-1 – Objects for reporting and controlling exceptions ...................................................................... 42
Table 4-2 – Device Errors ............................................................................................................................ 43
Table 4-3 – Manufacturer Errors ................................................................................................................. 43
Table 4-4 – Manufacturer Warnings ............................................................................................................ 44
Table 4-5 – User Specified Flow Limits ....................................................................................................... 46
Table 4-6 – User Specified Pressure Limits ................................................................................................ 47
Table 4-7 – Control Deviation Out of Limits ................................................................................................ 48