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Brooks Smart Series - Page 9

Brooks Smart Series
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Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008
Models 5800-S
8
• selectable soft start
• adaptive valve control
⇒ Adaptive filtering for signal flow component
• Alarms
⇒ Self-diagnostic
• EEPROM error
• database error
• analogue output error
⇒ Out-of-range indications
• for analogue set points higher than 100% (controller only)
• flow
• valve (controller only)
• analogue output
⇒ Environmental errors
• no gas flow detected
• power supply outside specification range
• ambient temperature outside specified range
• high and low flow alarms
Section 1: Introduction
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