B-48
Air purge procedures (Continued)
Step No. Procedure
4
Press
.
・The following screen appears.
5
Press
.
・The water flow/air blow system of the chuck table turns ON.
6
Keep the water flow/air blow system turned ON for 2 to 3 minutes to expel air from the
vacuum pump and water hoses.
7
Press
.
・The water flow/air blow system of the chuck table turns OFF.
Continued in the next section.
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