A-6
3-1. Installation Space
Considerations in selecting installation site
・Secure enough space taking operational and maintenance ease into account.
・Avoid places where temperature greatly changes.
・Maintenance space for spindle replacement requires at least 2,700 mm from the floor to the ceiling.
・The maintenance area is described with the recommended values that are based on SEMI S8.
Installation diagram (standard specification)
Installation diagram of DAG810 (standard specification) is described here.
Unit : mm
Operation /
Maintenance area
Adjuster feet (6)
690690
690
3390
1980
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