（xvii）
5.3.6 Setting the pump N2 flow low warning threshold .................... 65
5.3.7 Setting the Back Pressure high warning threshold ................. 66
5.4 Dip Switch ........................................................................................... 67
5.5 DIP Switch setting display ................................................................ 70
5.6 Starting/stopping the pump with the LCD controller......................... 71
6. Operation .................................................................................................. 72
6.1 Before Starting ................................................................................... 72
6.2 START/STOP ...................................................................................... 75
6.2.1 LOCAL (Pump Side) Start/Stop ................................................. 77
6.2.2 REMOTE Start/Stop .................................................................... 77
6.2.3 COMMUNICATION Start/Stop .................................................... 78
6.3 Operation when momentarily power failure happens ..................... 78
7. Maintenance and Inspection ................................................................... 79
7.1 Internal energies ................................................................................ 79
7.1.1 Power source .............................................................................. 79
7.1.2 Cooling water .............................................................................. 79
7.1.3 Nitrogen gas ................................................................................ 79
7.2 Routine Inspection ............................................................................. 80
7.3 Vacuum and Exhaust Piping ............................................................. 81
7.4 Lubricating Oil .................................................................................... 83
7.5 Spare (Maintenance) Parts List ......................................................... 85
7.6 List of wastes during maintenance .................................................. 86
7.7 Overhaul ............................................................................................. 86
8. Disconnection and Transportation ......................................................... 87
9. For SEMI S2 standard .............................................................................. 89
10. Troubleshooting ..................................................................................... 90
10.1 Troubleshooting (1) Basic trouble .................................................. 91
10.2 Troubleshooting (2) WARNING ....................................................... 92
10.3 Troubleshooting (3) ALARM ........................................................... 93
10.4 Troubleshooting (4) Option ............................................................. 94
PM10U
EBARA
CORPORATION
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