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EBARA EV-S100P
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P.60
Table 5.2 Alarm code list
Code
Code
ALARM name
1st
code
2nd
code
WARNING name
1st
cod
e
2nd
code
MP casing temp.
50
01
Cooling water flow low
00
01
BP motor temp.
51
00
MP casing temp.
05
01
MP motor temp.
52
00
High board inner temp.
13
00
Water Leakage ()
53
00
Pump N2 flow low
18
01
Emergency Stop()
59
00
Back pressure high ()
21
01
Back pressure high ()
63
00
Back pressure wire broke ()
02
Power failure
64
00
BP motor temp.
23
00
MP’s driver protective circuit activated (OC)
65
01
MP motor temp.
24
00
MP’s driver protective circuit activated (OV)
02
Inner communication error (MP driver)
26
01
MP’s driver protective circuit activated (OH1)
04
Inner communication error (BP driver)
02
MP’s driver protective circuit activated (OH2)
05
Inner communication error (IO)
03
MP’s driver protective circuit activated (CPF)
06
Inner communication error (AI) ()
04
BP’s driver protective circuit activated (OC)
66
01
BP’s driver protective circuit activated (OV)
02
BP’s driver protective circuit activated (OH1)
04
The mark “▲” indicates the item is optional.
BP’s driver protective circuit activated (OH2)
05
BP’s driver protective circuit activated (CPF)
06
BP overload 2
67
00
MP overload 2
68
00
BP step out
69
00
MP step out
70
00
Cooling water flow low
73
00
Motor thermostat
81
00
Inner communication error (MP driver)
01
Inner communication error (IO)
02
Inner communication error (BP driver)
03
MP Driver Gate OFF
20
BP Driver Gate OFF
21
PM10U
EBARA
CORPORATION

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