P.73
Operate the N
2
gas selector valve in accordance with the dilution N2 mode set by DIP
switch-A No. 7.
If DIP Switch is set to OFF Open Valve.
If DIP Switch is set to ON Close Valve.
[Note] For normal operation, open the N2 gas selector valve. To save N2 gas
set close the valve when the production process does not lead to the
formation of reaction by-products in the pump or when the process uses
non-corrosive gases.
[Note] The N
2
gas selector valve is positioned on the right panel when viewing
facing the utility side of the pump.
[Note] It take 10 over seconds, until the flow has stabilized after valve operation.
(3) Turn on the power supply to the pump.
WARNING ELB is not installed in the pump unit. Please install ELB based
on the law and the standard in the installation region.
(4) The LCD controller counts down 10 seconds after placing the Circuit
Protector (CP) into the ON position.
[ NOTE ] The pump cannot start while the measuring instruments are warming
up for 10 seconds after the CP is placed in the ON position.
(5) Check on the WATER FLOW display of the LCD Controller that the cooling
water flow rate is 1.5L/min. or more.
(EV-S20:1.5L/min, EV-S50/S100/S200:2.0L/min)
(6) Re-check on the PUMP N2 FLOW display of the LCD Controller that the
dilution N
2
gas flow rate is within the 17 - 21Pam3/s range. Also check that the
pressure gauge shows a reading of 0.09 - 0.12MPa.
After setting the pressure, press the red stopper to lock the knob in position.
In this condition, the shaft sealing N
2
flow rate is 2.0 – 2.5Pam3/s.
(The shaft sealing N
2
flow rate is contained in pump N
2
flow rate currently
displayed on the LCD controller.)
PM10U
EBARA
CORPORATION
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