© Edwards Limited 2014. All rights reserved. Page iii
Edwards and the Edwards logo are trade marks of Edwards Limited.
Contents
A546–00–880 Issue E
Tables
Table Page
1 Technical data ........................................................................................................... 7
2 Technical data ........................................................................................................... 7
3 Electrical data ............................................................................................................ 8
4 Centre of gravity and levelling foot loads (Refer to Figure 6) .................................................... 8
5 iGX connector types ..................................................................................................... 9
6 Technical data ..........................................................................................................10
7 Safety sensors ...........................................................................................................25
8 Accessories ...............................................................................................................34
Associated publications
Publication title Publication number
Vacuum pump and vacuum system safety P400–40–100
Trademark credits
Fomblin
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is a registered trademark of Ausimont SpA.