Edwards nXLi Series User Manual

Connecon for remote control and monitoring
To oper
ate the pump using parallel or serial control, the 15-way D-type connector must be
used (Figure 1 on page 11, item 8).
Refer to Figure 4 on page 23 for full details of the logic interface pins.
Connect the logic interface to the control equipment
The pump can be controlled using a hardware parallel control interface and / or via
commands sent over a serial interface.
To control the pump using the hardware parallel interface, refer to Parallel and serial control
mode on page 22 for more informaon. To control the pump using the serial interface,
please contact Edwards for further informaon.
Addional safety equipment
Install suitable measurement equipment in the nitrogen supply pipeline if the process tool/
control system needs to know the total ow rate of nitrogen to the pump for safety reasons.
Commissioning
1. Switch on the external electrical supply. Switch the mains circuit breaker (Figure 1
on page 11, item 9) to the ON posion and check that the power indicator LED
(Figure 2 on page 12, item 6) illuminates. If the LED does not illuminate, contact
Edwards.
2. Switch on the nitrogen supply, if required.
3. Ensure that the exhaust extracon system is not blocked (for example, that valves in
the exhaust extracon system are open).
4. Ensure that all openings to atmospheric pressure in the foreline vacuum system are
closed.
5. Momentarily press the start buon (Figure 2 on page 12, item 2) unl the run
indicator LED (Figure 2 on page 12, item 1) comes on and remains illuminated.
6. If the dry pumping system starts and connues to operate, connue at Step 7. If an
alarm condion is indicated:
a) Shut down the dry pumping system: refer to Shut down the pump on page 25
for shut down procedure.
b) Contact Edwards.
7. Aer commissioning the dry pumping system:
a) T
o connue to operate the system, refer to Start the pump on page 24 .
b) To shut down the system, refer to Shut down the pump on page 25 for shut
down procedure.
A770-10-880A - Installaon
Page 20

Edwards nXLi Series Specifications

General

Brand	Edwards
Model	nXLi Series
Category	Water Pump
Language	English