Edwards T-Station 75

© Edwards Limited 2011. All rights reserved. Page 9
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Technical data
D395-93-880 Issue A
If you wish to pump a gas not in the list above, contact your supplier for advice. If you do not contact your supplier,
you may invalidate the warranty on the pump. The pump is not suitable for pumping aggressive or corrosive gases.
2.6 Materials exposed to gases pumped
The following materials and component types are exposed to the gases pumped:
Aluminium alloys, stainless steels, fluoroelastomer and nitrile O-rings, hydrocarbon lubricant, felt, rare earth
magnets, silicon nitride, phenolic resin, carbon-fibre reinforced epoxy resin, fire retardant polypropylene,
polyamide and PVC.
2.7 Vent gas specification and vent control data
Although the pump may be vented to atmosphere, high relative humidity of the air may greatly increase the
subsequent pump-down time. To reduce pump-down times you should vent with dry, clean gases. Refer to the DX
turbo pump manual (B722-40-880) for the vent valve connection and refer to Section 4.3.3 of this manual for a
description of the vent options available on the T-Station and how to configure them.
Table 4 - T-Station technical data
Parameter
EXT75DX
ISO63
EXT75DX
63CF
EXT75DX
NW40
Inlet pumping speed:
N2 61 l s
-1
61 l s
-1
42 l s
-1
He 57 l s
-1
57 l s
-1
49 l s
-1
H2 53 l s
-1
53 l s
-1
48 l s
-1
Inlet compression ratio:
N2 > 1 x 10
11
> 1 x 10
11
> 1 x 10
11
He 1 x 10
6
1 x 10
6
1 x 10
6
H2 5 x 10
4
5 x 10
4
5 x 10
4
Ultimate pressure:
with rotary vane backing pump
*
*
Ultimate pressure 48 hours after bakeout with 2-stage rotary vane backing-pump.
< 5 x 10
-9
mbar < 5 x 10
-10
mbar < 5 x 10
-9
mbar
with diaphragm backing pump
†
†
Ultimate pressure 48 hours after bakeout with backing pressure < 5 mbar (500 Pa).
< 5 x 10
-8
mbar < 5 x 10
-9
mbar < 5 x 10
-8
mbar
Table 5 - Vent gas specification and vent control
Vent gas specification and control Reference data
Vent gas Dry air, nitrogen, argon and other inert gases
Maximum dew point at atmospheric pressure -22 °C
Maximum size of particulates 1 μm
Maximum concentration of oil 0.1 parts per million
Recommended time for rotational speed to reach 50% > 15 seconds
Maximum allowed rate of pressure rise Refer to Figure 5