© Edwards Limited 2011. All rights reserved. Page 31
Edwards and the Edwards logo are trademarks of Edwards Limited.
Spares and accessories
D395-93-880 Issue A
7 Spares and accessories
7.1 Introduction
Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, Canada, France,
Germany, Hong Kong, Italy, Japan, Korea, Switzerland, United Kingdom, U.S.A. and a worldwide network of
distributors. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards
training courses.
Order spare parts and accessories from your nearest Edwards company or distributor. When you order, state for each
part required:
Model and Item Number of your equipment
Serial number (if any)
Item Number and description of the part.
Fit accessories as described in the Supplementary Publications and in the instruction manual supplied with the
accessory.
7.2 Spares
The spares available for the turbo pump and backing pumps are listed in the CD instruction manuals supplied with
your equipment.
Pump spares:
7.3 Accessories
7.3.1 TAV vent-valve and vent-port adaptor (for DX turbo pump)
A solenoid-operated vent-valves is available for system venting. The valve is a 24 V d.c., normally-open and can be
driven by the turbo pump podule. The solenoid-valve is fitted in place of the manual-valve, or alternatively can be
fitted with an adaptor (supplied with the valve) and can be used with any suitable NW10 flanged port on your vacuum
system.
7.3.2 Outlet mist filter (for E2M1.5 rotary vacuum pump)
The outlet mist filter separates and traps oil droplets in the pump outlet to prevent oil mist discharge.
For all other Accessories such as Gauges, Active cables and Mains leads, refer to the T-Station ordering information
in the Edwards product catalogue.
Turbomolecular pumps EXT75DX / EXT255DX B722-40-880
Diaphragm pump XDD1 A746-02-885
Rotary vane pumps E2M0.7 / E2M1.5 A371-32-880
Product Item Number
TAV5 vent-valve B580-66-010
Product Item Number
EMF3 Outlet mist filter A462-20-000
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