Setup & Operation 3. Environments and Installation
36 LS20 Rev.4
Remove the bolts securing the wire ties
removed in
step (2).
3.5.2 Cleanroom-Model
(1) Unpack it outside of the clean room.
(2) Secure the Manipulator to delivery equipment such as a pallet with bolts so that the
Manipulator does not fall.
(3) Wipe off the dust on the Manipulator with a little alcohol or distilled water on a
lint-free cloth.
(4) Carry the Manipulator in the clean room.
(5) Refer to the installation procedure of each Manipulator model and install the
Manipulator.
(6) Connect an exhaust tube to the exhaust port.
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