Chapter 7 Troubleshooting
PAGE 7-4
A.03: TOOL ID Error
ID Data Error
There is an error in the ID data in
the preamplifier.
1. Inspect the tool cable.
2. Breaking or malfunction of the tool cable or
the tool may have occurred.
Tool Type Error
The system parameters D-No. 100
“Connected Tool No.” and D-No.
200 “controller Setup Tool No.”
differ.
1. Set D-No. 200 to the same value as the Tool
No. D-No. 100 of the system parameters
(SYS).
2. Breaking or malfunction of the tool cable or
the tool may have occurred.
Tool Not Connected
The tool is not connected.
1. Inspect the tool cable.
2. Breaking or malfunction of the tool cable or
the tool may have occurred.
Tool Communication Error
An error occurred in the
communication between the tool
preamplifier and the controller.
A.04: System Memory Error
FlashROM Write Error
An error occurred during writing
into the FlashROM of the controller.
1. Turn the control power OFF and then turn
ON the power again after waiting for at least
5 minutes.
2. Breaking or malfunction of the controller
may have occurred.
FlashROM Read Error
An error occurred during reading
from the FlashROM of the
controller.
Amplifier FlashROM Error
An error occurred during reading
from or writing into the FlashROM
of the amplifier.
Stored Data Write Error
An error occurred during writing
data to be stored in the SDRAM.
Stored Data Read Error
An error occurred during reading
data stored in the SDRAM.