Hitachi UTOPIA R32 Series - Vacuum Pumping

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PMEN0654 rev.0 - 12/2023
9
VACUUM PUMPING
Vacuum pumping
9.1 Basic Method ...................................................................................................40
9.2 TripleEvacuaonMethod ...............................................................................41
9.3 RAS-(2-3)HVRC3vacuumpumpingexample ...................................................42