HP 5528A

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INSTALLATION IF TABLE MOVES

SPINDLE

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ANGULAR

INTERFEROMETER

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INSTALLATION IF SPINDLE MOVES

ANGULAR

INTERFEROMETER

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ANGULAR

REFLECTOR

Figure 8-2. Positioning the Optics

Mode

5528A

Angular Measur

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ANGULAR

REFLECTOR

8-5

Main Page

Laser Measurement System5
Electrical Safety Considerations6
General6
Before Applying Power6
Safety Earth Ground6
Laser Head Safety Labels7
Table of Contents9
List of Figures17
Tables20
Contents23
Introduction to Hp's 5528A Laser Measurement System23
How to Use this Manual23
How Safe Is the Laser?24
What Safety Precautions Should I Take?24
Where Should I Keep the Ss28A When I'M Not Using It?24
What Measurements Can the Ss28A Makb25
What Equipment Is Required to Make These Measurements?25
Hardware - General Descriptions28
5508A Measurement Display28
5518A Laser Head28
Optics28
Straightness Optics29
Mounting Hardware29
Section 2: First Look31
Purpose32
Measurement Display Unit33
Front Panel - Tndicators, Line Switch34
Front Panel - Measurement Mode Keys34
Reset Key34
Distance34
Front Panel - Set up Keys35
Matl Temp Keys35
V.o.l.35
Exp Coeff35
Front Panel - Entry Keys36
Rear Panel36
10751 Air Sensor and 10757 Material Temperature Sensor41
Why Measure Air Temperature, Pressure or Humidity?41
Why Measure Material Temperature?41
Operation42
Physical Setup42
Interconnection and Turn-On44
Assembly of Optics45
Assembly of Interferometer45
Installation and Alignment of Optics46
Mounting46
Table Mounting46
Positioning of Optics47
Side View47
Distance Interferometer with Target48
Making the Measurement50
Making an Angular Measurement55
Measurement Procedures58
Summary58
Operating Procedures58
Reference Material59
Miscellaneous Notes59
Physical Set-Up of the Laser Head and Tripod60
Installing the Laser Head on the Tripod60
Contents60
Introduction60
Hardware Required for All Measurements61
Laser Head and Tripod Positioning Controls63
Cross Slide "Fit" Adjustments65
Translating and Rotating the Laser Head65
Positioning the Tripod and Laser Head66
Levelling the Laser Head68
Section Interconnections, Turn on70
Safety Information70
Contents70
Connecting the Laser Head to the Measurement Display71
Connecting Sensors to the Measurement Display73
Connecting the Rem Ote Control Box to the Measurement Display75
TO the MEASUREMENT Display77
CHECKING the LINE-Voltage SELECTION79
Connecting Hie System to the P Ower Line79
Line Voltage Selection80
Turn-On81
Distance Measurements82
Operating Specifications82
Contents82
Introduction82
Power-Up83
Hardware Required85
Optional Hardware85
Related Measurements85
Reference Material85
Interferometer Assembly88
Assembly of Optics88
INSTALLATION and ALIGNMENT of Optics90
Description90
Procedure91
Installation if Table Moves92
Installation if Spindle Moves92
Table Mounted94
Spindle Mounting94
Checking Alignment for Beam Strength96
Checking Alignment for Cosine Error97
Measurements Along a Perpendicular Axis98
Three Axes Positioning of Optics99
Other Mounting Requirements100
Selecting "Measurement Units100
Measurement Display Settings, Sensor Use100
Using Sensors101
Sensor Attachment101
Sensor Placement101
Air Sensor Orientation102
Measurement Display Settings103
Adjusting Humidity103
Set up Keys103
Making a Measurement106
System Checks106
What Affects Accuracy?106
Procedure106
Distance Measurement Error Sources107
Velocity -Of-Light Compensation107
Minimizing Effects107
Material Temperature Measurement108
Measurement Axis (Cosine Error)109
Uncompensated Measurement Path Length110
Using the Error Budget Worksheet110
Error Budget Worksheet113
Velocity Measurements116
Section 7, Velocity Measurements117
Reference Material117
Assembly, Installation, and Alignment, of Optics117
Measurement Display Setiings, Sensor Use117
Selecting "Measurement Units117
Using Sensors118
Measurement Display Settings (Wi T H Sensors)119
Angular Measurements124
Introduction124
Operating Specifications124
Related Measurements126
Installation and Alignment of Optics126
Important Considerations126
Description126
Checking Alignment for Beam Strength136
M Easu�Ement5 Along a Perpendicu Lar Axis136
Other Mounting Requirements136
Measurement Units139
Measurement Mode Keys139
Measurement Display Setiings140
Making a Measurement140
System Checks140
Procedures140
Measurements at Specific Physical Locations141
Measurements at Specified Time Intervals141
Laser System Error Sources141
Minimizing Errors, and Required Laser System Accuracy142
Flatness Measurements144
Accuracy Term144
Grid Map of Surface Plate149
Location of Laser Head150
Positioning of Optics for First Measurement Line150
What Affects Accuracy155
Straightness Measurements156
Slope169
Environmental Errors179
Contents182
Hardware Required184
Related Measurements186
Reference Material186
Installation and Alignment of Optics186
Important Considerations186
Description187
Installing Optics for a Vertical-Axis Measurement187
Final Adjustments (after Aligning)197
Checking Alignment for Beam Strength198
Travel Path223
Manual Removal or Slope223
Measurement Display Settings223
Making a Measurement223
System Checks223
Squareness Measurements228
Parallelism Measurements250
Linear Parallelism Measurements250
First-Axis Measurement251
Rotational Parallelism Measurements255
Alignment Techniques258
Summary of Alignment Methods258
Translating and Turning the Laser Head259
Gunsight Method259
Result of Retroreflector Movement262
Vertical Axis262
Horizontal Axis262
When to Turn the Laser264
Autoreflection Method265
Maximum Measurement Reading Method268
Autoreflection Summary268
More about the Reset Key276
Selecting the Auto Record Output Rate276
More about the Set up Keys277
More about the Preset Key278
Entering a Preset Number278
Viewing a Preset Number278
More about the MATL Temp Key279
To Display the Material Temperature279
To Enter a Material Temperature280
More about the V.O.L. Key280
To View the Current V.O.L. Compensation Number281
To Enter a V.O.L. Compensation Number281
More about the RESOL Key282
Smoothing282
To Display the Resolution Value282
To Specify a Resolution Value282
More about the EXP COEFF Key283
To View the Expansion Coefficient Value283
To Enter an Expansion Coefficient Value283
Errors and Error Messages284
Laser Measurement System Error Messaages284
HP-IB Information288
Data Transfer Without an HP-IB Controller289
Compensation Factor for Standard Conditions299
Sensor Considerations300
Absolute Pressure Versus Adjusted Pressure300
Use of Compensation Charts301
Guide to Compensation Tables301
Calculation of Exact Compensation Factor302
How Do You Enter the V.O.L. Compensation Value?304
Operator Maintenance306
Cleaning the Measurement Display Unit's Air Filter306
Calibration306
Cleaning the Optics307
Straightness and Squareness Considerations308
Calculation of Slope308
End Point Fit Method308
Least Squares Fit Method310
Calculation of Squarenes313
Squareness Sign Conventions315
Determining Sign Conventions315
Into and out of a Square316
Squareness Sign Convention Guide317
Principles of Operation324
Hardware Descriptions324
Laser Head325
Air Sensor325
Material Sensor326
Linear Interferometer326
Linear Retroreflector326
Angular Interferometer326
Principles of Measurements327
General System Principles327
Distance and Velocity Measurements329

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