HP 5528A User Manual

MAKING A MEASUREMENT
System Checks
1. Milke sure both laser Head porls <lfe switched 10 their large apertu r e$.
2. The laser Head turret must be set 10 " Olher" ,
3. The laser Head's READY indic ator mu st be lishl ed steadily (i.e., not blinking ).
4. Make sure your Laser Measurement System is properly co nnected to the HP Dimensional
Metrology Analysis System.
Make sure the Measurement Display 15 set-up to accept a co ntroller via HP-18 . Follow the
Instructions for "Data Transfer with an HP-IB Contro ll er", in Section 18 of this User's G uide .
Procedure
Non
The HP Dimensional Melrology Analysis System expects the
inspection lin es 10 be patterned exactly like Ihose in Figure 9-4 ,
However, you can insped Ih e lines in either direction , and in any
order, See Figure 9-7 for a SutUj:cs led rouline of lin e directions
and numbers,
1. For cach linc -
a, Tell the Melrology program Ihe direction you arc traveling, relative to the direction
arrows in figure 9-4, and whether you are moving toward or away from Ihe
I nlerlerome ler,
b. PasHion Ihe Footspa cer fl ush wilh Ihe Inlerferomeler's Flalness Mirror ,
c, Press RESET on the Measurement Display unit or on Ihe Remote Control unit.
d, Move the Footspacer a distance equal to its footspacing./These increments s hould be
marked on the St rai ghtedge.)
e, Press the Remote Conlro l Unit's RECORD bUll on , One measurement is made ea ch time
you
press this bullon .
f, Co ntinue moving Ihe Foolspacer in in crements equa l to its footspacing . pressing Ihe
RECORD bUllon afler each move,
2. Repos ition the Optics for the nexi line to be measured. Realign the laser beam to Ihe new
palh, Repeat Ihe measuremenl process,
Refer to figure 9-7 to sec where you c an position the Optics to measure each line of your
grid.
Keep in mind Ihal Figure 9-7 is not Ihe only way to make Ih ese measuremenl s. You can set up
In any arrangemenl th ai is easiest for your parlicutar application.
STEP 1.
LINE DIRECTION
AND NUMBER : + 1
<ff FLA THEIS
II MIRRORS
,
STEP 2.
LINE DIRECTION
AND NUMBER: -3
STEP 3.
LINE DIRECTION
AND NUMBER : - 7
•
DIAGONAL LINE I.E
FOOT'PACER WITH
ANGULAR REFLECTOR
MOVEMENT OF
REFLECTOR
ANGULAR
INTERFEROMETER
PERIMETER LINE CA
CENTER LINE DH
STEP 4.
LINE DIRECTION
AND NUMBER: - 5
STEP 5.
LINE DIRECTION
AND NUMBER: -e
STEP I.
LINE DIRECTION
AND NUMBER: -I
•
PERIMETER LINE EG
PERIMETER LINE loG
CENTER LINE BF
STEP 7.
LINE DIRECTION
AND NUMBER : -4
STEP I .
LINE DIRECTION
AND NUMBER: +2
•
ModelSS28A
FIOiIIlness MeasuremenlS
PERIMETER LINE CE
DIAGONAL LINE CG
fiRure 9 -7. Suggested Routine For Posili on ing Opti cs
9- 11

HP 5528A Specifications

General

Brand	HP
Model	5528A
Category	Measuring Instruments
Language	English