Mode
l
5528A
Squareness
Measurements
(In A H
orizon
t
al
Plane )
What Alfects Accuracy?
Since straightness optics
are
used
in
the squareness measurement. squareness accuracy
is
affect
ed
by th e
same
faclOrs thai influence st
rai
ghtness accuracy. See th e information
in
Sec
ti
on
10
of
thi
s User's Guide.
In
addition,
the
squarer,ess accuracy is also affected
by
Ih
e accuracy of the
optical square's
calibration
number,
flatness of the mirrors in the square, which contributes
additional
error
like that illustrat
ed
in Figure
'O
~
",
and misalignment of the input beam
ou
t of
the
optical plane of the square.
Th
ese err
ors
can
be
minimized by using the correct calibration
number
of the
square
for calculatio n
s.
proper
a
li
gnme
nt
of
the
square, and utilization of the
procedures
given
in
Section
10
of th
is
User's Guide.