Inficon XL3000flex - Page 24

4 | Description INFICON
24 / 108 XL3000flex-Operating-instructions-jina83en1-07-(2105)
XL3000flex, XL3000flexRC
Main fuse 2x T6,3 A 250 V
Protection class IP 30
Overvoltage category II
Physical data
XL3000flex, XL3000flexRC
Run-up time 150 s
Detectable gases Helium, hydrogen
Detectable masses
4
He, H
2
, Mass 3 (e.g. H-D,
3
He or H
3
)
Ion source 2 longlife Iridium filaments, Yttrium-oxide
coated
Gas flow
1
• High flow
• Low flow
3000 sccm
300 sccm
Minimum detectable leak rate (MDLR)
• Helium
• High flow
• Low flow
• Forming gas (95/5)
• High flow
• Low flow
2 x 10
-6
mbar l/s
2 x 10
-7
mbar l/s
2 x 10
-6
mbar l/s
2 x 10
-7
mbar l/s
Response time
• High flow
• Low flow
< 1 s
< 1 s
The A-weighted emission sound pressure level at the operator's location is less than
70 dB (A) for all foreseeable uses of the device. The noise emission measurement
declaration was drawn up in accordance with the harmonized standard DIN EN ISO
3744:2011.
1
Measured at 1 atm (1013 mbar) at sea level. The gas pressure changes with
atmospheric pressure and thus also with the geographical altitude.