8 | Cleaning and maintenance INFICON
90 / 108 XL3000flex-Operating-instructions-jina83en1-07-(2105)
8.2.4 Sending for repair or maintenance
Maintenance inside the device may only be performed by the manufacturer. We
recommend having the device serviced periodically by the manufacturer's service.
You can send in your device to INFICON so it can be maintained or repaired. For
further details see "Sending in the device [}91]”.
8.2.5 Maintenance plan
Assembly Maintenance Work
XL3000flex
Operating hours/years (intervals are
repeated)
Service
level
Spare part
number
2000 4000 8000 16000 24000 32000
1/4 1/2 1 2 3 4
SplitFlow 80 Changing the lubricant
reservoir
X
3
II 200003801
Change bearings and
replace oil wick
cartridge
X
2
III
Inspecting and
cleaning the fan
function
X
3
II
Diaphragm
pump
Replacing the
diaphragms valves
plates and O-Rings
X
1
III 200005414
Leak Detection
MSB module
Performing helium leak
detection on the MSB
module
X III
Sniffer line filters Replacing the sniffer
line filters
X
3
II 521-023
Air filter Replacing the air filter
on housing
X
3
I 200008670
Explanation of the maintenance plan:
• I Service level I Customer
• II Service level II Customer with technical training
• III Service level III Authorized INFICON service technician
• X Carry out maintenance as per operating hours or duration
• X
1
Maintenance after operating hours, not after duration
• X
2
Maintenance by duration, not by operating hours
• X
3
Dependent on environmental influences, operating conditions, contamination
and application process
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