Inficon XL3000flex - Page 83

INFICON Warning and error messages | 7
XL3000flex-Operating-instructions-jina83en1-07-(2105) 83 / 108
Warning
(Wrn)
Error (Err)
Error message
LDS3000
Error number Limit values Cause
LDS1000
Protocol
Binary or
ASCII
protocol
compatibilit
y mode
LDS1000/
LDS2010
Wrn360 Preamplifier output too low 31 123 <-70 mV at
500 GΩ
Poor ion source or contaminated
mass spectrometer
Wrn361 Preamplifier offset too high 31 123 >+/-50mV
at 500GΩ,
>+/-10mV
at 15GΩ,
<+/-10mV
at 470MΩ,
<+/-9mV
at 13 MΩ
Preamplifier defective
Wrn362 Preamplifier range error 31 123 Preamplifier or MSB box defective
Wrn390 500 G outside the range 31 123 450GΩ
550GΩ
Preamplifier defective, error at the
suppressor, IF board or MSB
defective
4xx TMP fault (also temperature)
Err400 TMP fault number 49 15
Wrn401 TMP warning number
Err402 No communication with
TMP
49 15 Cable to TMP / TMP defective, IF
board or MSB defective
Err403 TMP rotation speed too
low
53 142 < 95% of
the target
value
Pressure too high, TMP defective
Err404 TMP current consumption
too high
49 2 3A
Err405 No TMP run-up time 60 61 5 min. Pressure too high, TMP faulty
Err410 TMP temperature too high 49 2 61°C Cooling failed, check MSB module
operating conditions
Wrn411 High TMP temperature 49 2 60°C Cooling failed, check MSB module
operating conditions
Err420 TMP voltage too high 49 2 Power supply defective, TMP
defective