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MKS e-Vision+ - Product Specifications

MKS e-Vision+
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e-Vision and e-Vision+ LP101013.100 – 01 January 2004
MKS Instruments, Spectra Products
10
1. Specification
1.1 Mechanical
e-Vision
&
e-Vision
+
Size: 127mm wide x 127mm deep x 159mm deep, plus 34mm over analyser
connector.
Weight: 2.0 kg
24VDC Power Supply
Size: 75mm wide x 45mm high x 170mm deep plus 30mm over strain relief.
Weight: 0.6 kg
Analyser
e-Vision - 2 inch single mass filter, 1 – 100amu, Faraday detector.
Max. Operating pressure 5x10
-4
Torr (6.5x10
-4
mbar)
e-Vision
+
- 4 inch single mass filter, 1 -100amu & 1 – 200amu, Faraday and SEM
detector.
Max. Operating pressure 7.6x10
-5
(1x10
-4
mbar)
1.2 Electrical
Power Inlet: 100 to 120, 200 to 240 VAC rms 47- 63Hz 2.1A rms
Installation category (overvoltage category) II to IEC664
Fuses Internal, not user replaceable
Insulation Class I to IEC536
1.3 Environmental
Temperature range 0 to 40
0
C, 80%RH non-condensing, operating and storage.
Pollution degree 2 to EN61010
Enclosure IP20 to EN60529

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