e-Vision and e-Vision+ LP101013.100 – 01 January 2004
MKS Instruments, Spectra Products
37
8.6 Source Alignment Jig
Note the orientation of the source assembly when inserted into the jig. Align the
extract plate’s barrel connector with the alignment indicator on the jig.
Remove the source by pushing it out from the bottom of the jig, do not pull out the
source.
Item Description (Dimensions in mm) Part Number
1 Source Alignment Jig 842-029
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