MKS e-Vision+ - Source Assembly

e-Vision and e-Vision+ LP101013.100 – 01 January 2004
MKS Instruments, Spectra Products
36
8.4 Source Assembly
Item Description (Dimensions in mm) Part Number
1 Plain washer SS M1.6 27031600
2 Screw M1.6 x 8 200901608
3 Ceramic Tube 2.8D x 3.5L 400020035
4 Ceramic Washer 4.7D x 1L 400010203
5 Repeller Plate Assembly LM508-018PL
6 Source Plate Assembly LM508-017PL
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