e-Vision and e-Vision+ LP101013.100 – 01 January 2004
MKS Instruments, Spectra Products
31
7.6.1 Removing the ion source
1. Remove the analyser from the vacuum system, place it on the bench in an
upright position (holding the analyser in a small bench vice is recommended) and
remove the filaments as described in Section 7.4.1.
2. Loosen the three M2 x 4 that secure the three insulated wires that run from the
analyser flange assembly to the Source, Repeller and extractor plates and slightly
bend the wires out of the way.
3. Remove the four M2 x 4 screws (Item 2) that hold the source assembly to the
filter assembly and carefully withdraw the source assembly from the filter.
7.6.2 Dismantling the source assembly
Before proceeding with this section, please ensure that you have the
correct Source Alignment Jig
and spare ceramics and screws available.
Refer to the exploded views of the Source Assembly shown on Page 34.
1. Carefully unscrew the four M1.6 x 8 screws (Item 1) and withdraw them from
the assembly.
2. Using tweezers, remove the four ceramic washers (Item 3), if undamaged keep
in a safe, clean place ready for the re-assembly.
3. The Repeller Plate (Item 4) can now be removed from the mounting ring.
4. Using tweezers, remove the four ceramic washers (Item 3) and the four ceramic
tubes (Item2), if undamaged keep safe as before.
5. The Source Plate (Item 5) can now be removed from the mounting ring.
This is normally as much as you will need to dismantle for cleaning or replacing
source components. The Extract plate does not usually require service, as it is
furthest away from potential contamination. However, if you wish to remove the
Extract Plate, see the exploded diagram in Section 8.5.
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