MKS e-Vision+ - Extract Plate

e-Vision and e-Vision+ LP101013.100 – 01 January 2004
MKS Instruments, Spectra Products
38
8.5 Extract Plate
Item Description
(Dimensions in mm) Part Number
1 Plain washer SS M1.6 27031600
2 Screw M1.6 x 6 200901606
3 Ceramic Tube 2.8D x 2L 400020020
4 Ceramic Washer 4.7D x 1L 400010203
5 Extract Plate Assembly LM508-016PL
6 Source Mounting Ring 305080603
2
3
4
5
4
6
1