MKS e-Vision+ - Page 8

e-Vision and e-Vision+ LP101013.100 – 01 January 2004
MKS Instruments, Spectra Products
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7. Analyser Maintenance ........................................................... 23
7.1 Overview ......................................................................... 23
7.2 Ohmmeter analyser checks................................................ 25
7.3 Checking filaments ........................................................... 26
7.4 Changing filaments ........................................................... 27
7.4.1 Removing the filaments.................................................. 27
7.4.2 Fitting new filaments...................................................... 28
7.5 Ion Source cleaning .......................................................... 29
7.6 Cleaning or replacing the ion source................................... 30
7.6.1 Removing the ion source ................................................ 31
7.6.2 Dismantling the source assembly .................................... 31
7.6.3 Source Re-assembly....................................................... 32
8. Exploded Views...................................................................... 33
8.1 Analyser Flange pin-outs ................................................... 33
8.2 Exploded view of the Analyser ........................................... 34
8.3 Filament Plate .................................................................. 35
8.4 Source Assembly .............................................................. 36
8.6 Source Alignment Jig ........................................................ 37
8.5 Extract Plate .................................................................... 38
9. Returning Your Unit for Service ............................................ 39
Support Contact Numbers....................................................... 39
10. FTP Mode ............................................................................. 42