Maintenance
Change chamber lid gasket
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¾ During insertion, do not stretch the chamber lid gasket.
¾ Smooth out chamber lid gasket.
¾ Perform a vacuum test, see Section 7.8 "PERFORMING THE VAC-
UUM TEST".
7.8 Performing the vacuum test
¾ Call up the "Service" menu.
¾ Call up the "test" menu.
¾ Select Vacuum test.
¾ Switch on the vacuum test.
¾ Return to the status display.
¾ Close and press down the chamber lid.
– The evacuation system is being checked.
– The processes in the machine run automatically.
– The corresponding diagnostic message appears.
– The chamber lid opens.
¾ Acknowledge the diagnostic message.
– The vacuum test is switched off.
¾ If the vacuum test is not successful, see the displayed diagnostic
message to correct the fault, see Section 8 "TROUBLESHOOTING".