Olympus AL120-12 Series Maintenance Manual

Maintenance Manual
AL120-12
Series
300mm Semiconductor Wafer Loader
Wafer Loader
AL120-LMB12-LP3
AL120-LMB12-F
Wafer Loader Accessory
AL120-VS12
AL120-RC
Thank you for purchasing the Olympus AL120 Series Wafer Loader.
In order to fully utilize its performance and secure safety, please read this manual before operation.
Please also keep it at hand during operation as well as for future reference.
This manual is exclusively for maintenance service engineer.
Please also keep it at hand during operation as well as for future reference.
AM5060-01

Olympus AL120-12 Series Specifications

General

Category	Microscope
Series	AL120-12 Series
Eyepiece	WF10x/18mm
Objective Lens	Achromatic 4x, 10x, 40x
Focusing	Coaxial coarse and fine focusing
Illumination	LED illumination
Power Supply	100-240V, 50/60Hz
Magnification	40x, 100x, 400x, 1000x