Maintenance Manual
AL120-12
Series
300mm
Semiconductor Wafer Loader
Wafer Loader
AL120-LMB12-LP3
AL120-LMB12-F
Wafer Loader Accessory
AL120-VS12
AL120-RC
Thank you for purchasing the Olympus AL120 Series Wafer Loader.
In order to fully utilize its performance and secure safety, please read this manual before operation.
Please also keep it at hand during operation as well as for future reference.
This manual is exclusively for maintenance service engineer.
Please also keep it at hand during operation as well as for future reference.
AM5060-01
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