Olympus AL120-12 Series - Test Names and Functions

Maintenance Manual Test Programs
3-3
Page
3 Test Names and Functions
1. Test names and test functions are shown in Tables 2-1 and 2-2, respectively.
Table 2-1: Test Programs
Button No.
Test Name
1
Wafer mapping sensor movement check *Applicable to AL120-LMB12-F
FOUP-OPENER movement check
*Applicable to AL120-LMB12-LP3
2
A-arm vertical movement check
3
A-arm horizontal movement check
4
A-arm side-to-side movement check
5
Macro table vertical movement check
6
L-arm vertical movement check
7
L-arm rotation check
8
F-arm vertical movement check
9
F-arm horizontal movement check
10
Centering sensor count check
11
Wafer mapping sensor mapping sensor height check *Applicable to AL120-LMB12-F
FOUP-OPENER mapping sensor parameter setting *Applicable to AL120-LMB12-LP3
12
A-arm insertion height check and vertical movement check
13
A-arm origin in backward/forward and side-to-side direction check
14
Centering transfer position check
15
Notch alignment adjustment
16
L-arm rotation origin sensor position check
17
F-arm horizontal origin sensor position check
18
Vacuum switch check
19
Notch sensor and wafer sensor check
20
Stage lock and observation window lock movement check.
21
LED lamp check
22
Button operation check
23
Sensor and button check
24
Wafer type setting
25
Wafer unloading position adjustment
26
Software version, error log display and operation settings