Maintenance Manual
Table of Contents
1 Nomenclature 1-1
1-1 Wafer Loader Main Body ······················································ 1-
1-1-1 AL120-LMB12-F ··········································································· 1-１
1-1-2 AL120-LMB12-LP3 ········································································ 1-2
1-1-3 BACK PART [MAIN DISCONNECTOR][AL120-LMB12-F] ······························· 1-3
1-1-4 BACK PART [MAIN DISCONNECTOR][AL120-LMB12-LP3] ··························· 1-3
1-1-5 OPERATION PANEL ·········································································· 1-4
1-1-6 FOUP OPENER OPERATION DISPLAY PANEL ············································ 1-4
1-2 Remote Controller (Option) ·················································· 1-5
2 Adjustments 2-1
2-1 Registration of Inspection Wafer by Type ······························· 2-1
1 Registration of a New Type of Inspection Wafer (Cassette to be Used and Wafer
Thickness) 2-1
2-2 Adjusting the Vacuum Switches ··········································· 2-6
1 How to adjust vacuum switches 2-6
3 Test Programs 3-1
1 How to Use the Programs 3-1
2 To open the door of the FOUP opener of AL120-LMB12-LP3 3-2
3 Test Names and Functions 3-3
4 Replacement of Consumables 4-1
1 Macro (Center) Table: If a vacuum error has occurred or the table has become damaged 4-1
2 Macro (Center) Table Oil Seal: If a vacuum error has occurred 4-2
3 A-arm: If a vacuum error has occurred or the A-arm vacuum pad has become damaged 4-3
4 Vacuum Table: If a vacuum error has occurred or the table has become damaged 4-4
5 Oil Seal for Vacuum Table: If a vacuum error has occurred 4-4
6 L-arm: If a vacuum error has occurred or the L-arm vacuum pad has become damaged 4-6
7 F-arm: If a vacuum error has occurred or the F-arm vacuum pad has become damaged 4-6
8 Rubber Microscope Legs: If wafer transfer sound has increased 4-7
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