Olympus AL120-12 Series - Nomenclature; Wafer Loader Main Body; Al120-Lmb12

Operation/Maintenance Manual Nomenclature
1-1
Page
1 Nomenclature
1-1 Wafer Loader Main Body
1-1-1 AL120-LMB12-F
Power Switch
Lo
ck ring
Joystick
EMO
Cassette base
Operation Panel
Warning label
Hand guard
Warning label
A
-arm
Stage operation permission LED
F1
-arm
F2
-arm
Macro table
Notch alignment sensor
L
-arm
Cover
Back Macro tilt angle control buttons