Olympus AL120-12 Series - To Open the Door of the FOUP Opener of AL120-LMB12-LP3

Test Programs Maintenance Manual
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Page
2 To open the door of the FOUP opener of AL120-LMB12-LP3
With door of the FOUP opener closed, when the observation window makes its window open then close, the
board on the operation panel is reset automatically.
In need of operation with the observation window open for solenoid valves check and sensors check etc, make
sure to close the door of the FOPU opener before operation.
DO NOT insert hands and face into the door of the FOUP opener, it may cause serious injury.
Make sure to close the observation window before tuning on the power of the system
The door of the FOUP opener can be open and close by following procedure.
・To open the door of FOUP opener.
１．If the cassette is mounted on the FOUP opener, remove it.
２．Press the [M3] button, and then press the [Start] button.
If the loader has not been initialized yet, initialize the loader. If the door of the FOUP opener is open, press
the [Start] button while pressing the interlock switch of the FOUP opener, and close the door of the FOUP
opener once. Do not release your hand from the interlock switch until the door of the FOUP opener closes
completely.
３．If you press the [Start] button while pressing the interlock switch of the FOUP opener, the door of the FOUP
opener opens. Do not release your hand from the interlock switch until the door of the FOUP opener opens
completely.
４．Release your hand from the interlock switch, and press the [Start] button.
・To close the door of the FOUP opener.
１．Close the observation window.
２．Press the [M4] button, and then press the [Start] button. If the loader has not been initialized yet, initialize
the
loader.
３．If you press the [Start] button while pressing the interlock switch of the FOUP opener, the door of the FOUP
opener closes. Do not release your hand from the interlock switch until the door of the FOUP opener closes
completely.
※If you press the [Start] or the [Quit] button without pressing the interlock switch, the loader stops the
operation by Error No.E1591(FOUP opener Error). Turn ON the power again.
※If you release your hand from the interlock switch during operation, the loader stops the operation to
open/close the door. Press the interlock switch again to resume the operation. If you release your hand
from the interlock switch for a while, the loader stops the operation by Error No.E1523（FOUP opener
Error). Turn ON the power again.
ＣＡＵＴＩＯＮ
interlock switch
Do not insert hands and face into the door of FOUP opener.
Do not operate the loader with the weight, etc. on the interlock switch.