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Olympus AL120-12 Series - User Manual

Olympus AL120-12 Series
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Operation Manual
AL120-12
Series
300mm
Semiconductor Wafer Loader
Wafer Loader
AL120-LMB12-LP3
AL120-LMB12-F
Wafer Loader Accessory
AL120-VS12
AL120-RC
Thank you for purchasing the Olympus AL120 Series Wafer Loader.
In order to fully utilize its performance and secure safety, please read this manual before operation.
Please also keep it at hand during operation as well as for future reference.
AM5059-01

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Olympus AL120-12 Series Specifications

General IconGeneral
CategoryMicroscope
SeriesAL120-12 Series
EyepieceWF10x/18mm
Objective LensAchromatic 4x, 10x, 40x
FocusingCoaxial coarse and fine focusing
IlluminationLED illumination
Power Supply100-240V, 50/60Hz
Magnification40x, 100x, 400x, 1000x

Summary

Introduction

AL120 Series Lineup

Overview of AL120 series product configurations and capabilities.

Precautions

Safety Precautions

Guidelines for safe operation and handling of the equipment.

Earthquake Protection Measures

Methods to secure the equipment against seismic activity.

Safety Symbols and Warning Indications

Explanation of safety symbols and warning labels on the device.

Before Starting Operations

Maintenance and Storage

Procedures for equipment maintenance and proper storage.

Daily Checks

Conformity Standards

Proper Power Supply Cord Selection

Guidelines for selecting the correct power supply cord for safety.

Nomenclature

Wafer Loader Main Body Components

Identification of key parts of the wafer loader main body.

Remote Controller

Description and function of the optional remote controller.

Vacuum Stage Components

Identification of components of the vacuum stage.

Outline of Operation Procedures

Procedure Before Starting Transfer

Steps to prepare the loader before initiating wafer transfer operations.

Vacuum Stage Operation

Instructions for moving and using the vacuum stage components.

Start of Transfer

Procedures for initiating the wafer transfer process.

Top Macro Inspection Procedure

Detailed steps for performing the Top Macro inspection.

Back Macro and 2 nd Back Macro Inspection

Procedures for Back Macro and 2nd Back Macro inspections, including tilt angle settings.

Macro Inspection Observation Window

Operation and safety for the macro inspection observation window.

Wafer Transfer to Vacuum Stage

Steps for transferring wafers onto the vacuum stage for inspection.

Registering Inspection Results

How to register defective wafers and confirm results.

Stopping and Pausing Operations

Procedures for temporarily stopping, pausing, or rejecting wafers.

Unloading and Emergency Stop Procedures

Instructions for unloading wafers and using the emergency stop function.

Inspections

Preparations

Steps required before initiating any inspection procedures.

Microscope Inspection

Detailed procedure for performing microscope inspection on wafers.

Top Macro Inspection

Procedure for performing the Top Macro inspection on wafers.

Back Macro Inspection

Procedure for performing the Back Macro inspection on wafers.

Back Macro + 2 nd Back Macro Inspection

Combined procedure for Back Macro and 2nd Back Macro inspections.

Top Macro + Microscope Inspection

Combined procedure for Top Macro and Microscope inspections.

Back Macro + Microscope Inspection

Combined procedure for Back Macro and Microscope inspections.

Top Macro + Back Macro Inspection

Combined procedure for Top Macro and Back Macro inspections.

Full Inspection Sequence

Procedure for performing a comprehensive inspection sequence.

Special Operations

Specialized procedures and settings beyond standard inspections.

Changing Wafer Selection Settings

How to modify wafer selection during or after inspection.

Specifications

Wafer Size and Cassette Compatibility

Details on wafer sizes, cassette types, and inspection capabilities.

Inspection Modes and Functions

Description of inspection modes, auxiliary functions, and protective features.

Loader Utilities and Environment

Information on power, environment, dimensions, and weight of the loader.

Problems during Use and Solutions

Troubleshooting: Warning Codes

Guide to identifying and resolving warning codes displayed by the loader.

Troubleshooting: Error Codes

Guide to identifying and resolving error codes displayed by the loader.

Circuit Breaker Reset and Emergency Off

Procedures for resetting circuit breakers and using the emergency off function.

Automatic Unloading Procedures

Steps for automatically unloading wafers during various fault conditions.

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