Troubles and Countermeasures / Automatic Unloading Operation Manual
1 During the Top Macro Inspection
When the loader has stopped with a wafer held on the macro table, the
vacuum remains on. Unload the wafer according to the following
procedure.
1. If the main switch is turned ON, the loader will not operate but will
indicate the warning code [W0007], still holding the wafer.
2. Removing the wafer using tweezers:
Press the [start] button ① to lower the macro table. The table is set
horizontally and the wafer vacuum is canceled. Open the door and
remove the wafer using tweezers, etc.
3. Unloading the wafer automatically:
Using the Wafer No. selector buttons, specify the number of the
cassette slot to unload the wafer.
4. The LED in the specified Wafer No. selector button lights up.
5. Press the [Unload] button .
6. After wafer mapping is completed, the wafer is automatically
unloaded into the specified slot.
2 During the Back Macro Inspection
When the loader has stopped with a wafer held on the L-arm, the vacuum
remains on. Unload the wafer according to the following procedure.
1. If the main switch is turned ON, the loader will not operate but will
indicate the warning code [W0008], still holding the wafer.
2. Removing the wafer using tweezers:
Press the [start] button ①. The wafer is transferred onto the macro
table and the wafer vacuum is canceled. Open the door and remove
the wafer using tweezers, etc.
3. Unloading the wafer automatically:
Using the Wafer No. selector buttons, specify the number of the
cassette slot to unload the wafer.
4. The LED in the specified Wafer No. selector button lights up.
5. Press the [Unload] button.
6. After wafer mapping is completed, the wafer is automatically
unloaded into the specified slot.
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