Operation Manual Troubles and Countermeasures / Automatic Unloading
5-6 Automatic Unloading
When the power is cut off with a wafer left in the transfer path in events
such as an emergency halt, power failure, or occurrence of error, the
wafer left in the transfer path can be unloaded automatically into the
cassette following the procedure given below (5-6 1 to 4) or can be
removed using tweezers.
If the wafer loader judges that wafers cannot be automatically unloaded,
error No.
E1004 (the position of the wafer is out of the allowable range) or
No. E0111,E0209,E0506 is displayed on the liquid crystal panel .
In this case, turn the main switch OFF and unload the wafer into the
cassette using tweezers or similar tools
•
When using the automatic unloading procedure after a warning or error has
occurred, remove the cause of the warning or error before attempting automatic
unloading. If automatic unloading is done before the cause is removed, it may
cause damage to the wafers. If the cause is unknown, unload the wafers into the
cassette using tweezers or similar tools, and then turn on the loader.
•
Make sure that there are no wafers in the specified slot before using the
automatic unloading procedure.
•
Your loader may have been set to skip initialization when the power is turned on.
Press the [Start] button to initialize the loader, and then follow the automatic
unloading procedure.
•
When the wafer is removed using the tweezers or when the error code [E1004]
appears, you can open the observation window. During automatic unloading, as
the open/close lock mechanism of the observation window is enabled, you
cannot open the observation window. Be careful, if you open the window forcibly,
the window may be damaged.
E1004
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