Troubles and Countermeasures / How to Reset the Circuit Breaker Operation Manual
5-3 How to Reset the Circuit Breaker
1) Turn the main switch OFF, disconnect the power cord on the
back side of the loader, and press the reset button
(protruding part) of the circuit breaker that has tripped.
2) After the circuit breaker switch returns to the normal position,
connect the power cord to AC Line again.
3) Turn the main switch ON and check that the loader operates
normally.
When the circuit breaker has tripped, disconnect the power cord
immediately and remove the cause.
5-4 Emergency Off
By pressing the [EMERGENCY OFF] button the system can be powered
off.
Make sure to check the Main switch is turned OFF before release the
[EMERGENCY OFF] button.
In order to unlock the [EMERGENCY OFF] button rotate its knob to
clockwise.
If there are any wafers in the transfer path, refer to section 5-6 Automatic
Unloading.
5-5 Power Failure
Wafers on transfer arms remain held by the vacuum when the power
supply is cut in events such as blackouts. If there are no wafers in the
transfer path of the loader, turn the main switch OFF then turn it back ON.
If there are any wafers in the transfer path, turn the main switch OFF and
refer to 5-6 Automatic Unloading.
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